The EXCITE is a single frequency all-solid-state laser system for applications in the UV such as wafer inspection, calibration of spectrometers and interferometric applications. The spectral bandwidth of less than 30 MHz is near its theoretical Fourier limit.

The laser provides short temporal pulses in a diffraction-limited beam with M² < 1.6 at repetition rates between 1 and 30 kHz. The average output power is more than 150 mW at 266 nm, or 500 mW at 355 nm, with ultra-stable pulse traces and a long coherence length of more than 4 m in a rugged industrial design.

IMPRESS 213

Applications EXCITE Series

Wafer inspection
Photoluminescence
Interferometry
Raman spectroscopy
Holography
Spectrometer calibration
Metrology
Direct interferometric lithography

Optional

Graphical user interface
LabVIEW libraries
CDRH compliance shutter

 

SpecificationsEXCITE Series Specifications

PerformanceEXCITE Series Performance

 Beam ProfileEXCITE Series Beam Profile

Laser Head Dimensions

EXCITE Series Beam Laser Head Dimensions

System Dimensions (L x W x H) and Weight

EXCITE Series Beam system dimension+weight

Electrical Characteristics

EXCITE Series System Electrical Characteristic